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Polysilicon reactor working principle
Release time:
Sep 11,2024
The principle of operation of a polysilicon reactor involves the conversion of feedstock gases into polysilicon through chemical reactions in a high temperature, high pressure environment. Specifically, the Modified Siemens Method is the main process used to produce polysilicon, which utilizes high-purity hydrogen gas to reduce high-purity trichlorohydrosilicon, and the resulting polysilicon is deposited on a silicon core. This process not only saves energy and reduces consumption, but also recycles the by-products and heat generated during the production process.
In the modified Siemens method, the reactor is usually constructed as a tubular reactor or a bubbling stirred kettle, which are capable of efficiently carrying out both gas-phase and liquid-phase reactions. The feed gas enters the reactor through an air inlet and reacts chemically with hydrogen at a high temperature to produce polysilicon. During the reaction process, the tail gas is discharged through the exhaust port, while the by-products such as H₂, HCI, SiCI₄, etc. are recycled, which achieves the maximum utilization of resources and environmentally friendly production.
In addition, the design of the new reduction furnace further optimizes the structure of the reactor to achieve a more efficient gas mixture and lower energy consumption through uniformly distributed inlet and exhaust gas outlets. This design not only increases polysilicon yield, but also improves the surface quality of the product and reduces energy consumption during production.
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